Li He

Profile Information
Name
Dr. Li He
Institution
University of Wisconsin
Position
Assistant Scientist
h-Index
ORCID
0000-0001-8755-2331
Biography

Dr. Li He is an assistant scientist at the department of Engineering Physics, University of Wisconsin-Madison. She graduated from University of Virginia with Ph.D. in Materials Science and Engineering and conducted postdoc research at Rensselaer Polytechnic Institute and then UW-Madison. She specializes in nanoscale characterizations of advanced alloys and semiconductors using electron microscopy. Her current work includes ion irradiation and post-irradiation characterization of stainless steels and zirconium alloys for nuclear reactors.

Expertise
Irradiated Microstructure
Publications:
"Atomic Resolution Imaging of Black Spot Defects in Ion Irradiated Silicon Carbide" Li He, Hao Jiang, Yizhang Zhai, Cheng Liu, Izabela Szlufarska, Beata Tyburska-Puschel, Kumar Sridharan, Paul Voyles, Microscopy and Microanalysis Vol. 21 2015 1337-1338 Link
"Effect of grain size on the irradiation response of Grade 91 steel subjected to Fe ion irradiation at 300 °C" Haiming Wen, Jiaqi Duan, Li He, Journal of Materials Science Vol. 57 2022 13767-13778 Link
"Effects of Al and Ti Additions on Irradiation Behavior of FeMnNiCr Multi-Principal-Element Alloy" Andrew Hoffman, Haiming Wen, Li He, Kumar Sridharan, Matthew Luebbe, Jiaqi Duan, JOM Vol. 72 2020 150-159
Two Co-free multi-principal-element alloys (MPEAs), viz. single-phase face-centered cubic (FCC) Fe30Ni30Mn30Cr10 and (Fe30Ni30Mn30Cr10)94Ti2Al4 (all in atomic percent) with FCC matrix containing Ni-Ti-Al enriched L12 (ordered FCC) secondary phase (γ′), have been developed and investigated. The alloys were ion irradiated at 300°C and 500°C to peak damage of 120 displacements per atom (dpa). Compared with the (Fe30Ni30Mn30Cr10)94Ti2Al4 alloy, in the Fe30Ni30Mn30Cr10 alloy, the dislocation loops were smaller, with a higher number density. The difference in loop size between the two MPEAs was attributed to the addition of Ti to the matrix, which was anticipated to lower the stacking fault energy and stabilize the faulted Frank loops. The γ′ phase showed good stability under irradiation, with no new γ′ precipitation or growth in existing precipitates. Both alloys showed similar irradiation-induced hardening at 300°C, but the (Fe30Ni30Mn30Cr10)94Ti2Al4 alloy exhibited lower irradiation-induced hardening at 500°C compared with the Fe30Ni30Mn30Cr10 alloy.
"Enhanced diffusion of Cr in 20Cr-25Ni type alloys under proton irradiation at 670 °C" Tianyi Chen, ying yang, Li He, Beata Tyburska-Puschel, Kumar Sridharan, Haixuan Xu, Lizhen Tan, Nuclear Materials and Energy Vol. 17 2018 142-146 Link
"Enhanced Resistance to Irradiation Induced Ferritic Transformation in Nanostructured Austenitic Steels" Andrew Hoffman, Maalavan Arivu, Haiming Wen, Li He, Kumar Sridharan, Xin Wang, Xiang Liu, Lingfeng He, Yaqiao Wu, Materialia Vol. 13 2020 Link
Irradiation induced phase transformation of γ-austenite to α-ferrite has been observed in austenitic steels for the past several decades. This transformation can be detrimental to structural materials in a nuclear reactor environment as the increased fraction of the ferritic phase can increase corrosion and embrittlement and lead to stress corrosion cracking. This transformation is caused by both strain induced martensite transformation as well as radiation induced segregation and precipitation. In this study, two radiation tolerant nanostructured 304L austenitic steels (one ultrafine grained and one nanocrystalline) were manufactured using severe plastic deformation. These nanostructured 304L steels were compared to conventional coarse-grained 304L, after self-ion irradiation at 500°C up to a peak damage of 50 displacements per atom. Phase fraction after irradiation was analyzed using grazing incidence x-ray diffraction, precession electron diffraction, and electron backscatter diffraction. Nanostructured 304L steels showed significant resistance to irradiation induced austenite to ferrite transformation. This resistance was shown to be due to a decrease in defect formation, as well as a reduction in radiation induced segregation and precipitation.
"Evolution of small defect clusters in ion-irradiated 3C-SiC: Combined cluster dynamics modeling and experimental study" Cheng Liu, Li He, Yizhang Zhai, Beata Tyburska-Puschel, Paul Voyles, Kumar Sridharan, Dane Morgan, Izabela Szlufarska, Acta Materialia Vol. 125 2017 377-389 Link
"High-Resolution Scanning Transmission Electron Microscopy Study of Black Spot Defects in Ion Irradiated Silicon Carbide" Li He, Yizhang Zhai, Cheng Liu, Chao Jiang, Izabela Szlufarska, Beata Tyburska-Puschel, Kumar Sridharan, Paul Voyles, Microscopy and Microanalysis Vol. 20 2014 1824-1825 Link
"Integrated Computational Study of Radiation Damage Effects in Grade 92 Steel and Alloy 709" Haixuan Xu, Lizhen Tan, Li He, Vol. 2019 Link
"Measurement of Irradiation-induced Swelling in Stainless Steels with a New Transmission Electron Microscopy Method" Li He, Haixuan Xu, Lizhen Tan, Paul Voyles, Kumar Sridharan, Microscopy and Microanalysis Vol. 23 2017 2234-2235 Link
"Microstructural evolution in Fe-20Cr-25Ni austenitic alloys under proton irradiation at 670 ºC" Tianyi Chen, Lizhen Tan, Li He, Beata Tyburska-Puschel, Kumar Sridharan, Transactions of American Nuclear Society Vol. 117 2017 581-583 Link
"Radiation-induced mobility of small defect clusters in covalent materials" Hao Jiang, Li He, Dane Morgan, Paul Voyles, Izabela Szlufarska, Physical Review B Vol. 94 2016 024107 Link
"Size distribution of black spot defects and their contribution to swelling in irradiated SiC" Beata Tyburska-Puschel, Yizhang Zhai, Li He, Cheng Liu, Alexandre Boulle, Paul Voyles, Izabela Szlufarska, Kumar Sridharan, Journal of Nuclear Materials Vol. 476 2016 132-139 Link
"Structural Evolution of Oxidized Surface of Zirconium-Silicide under Ion Irradiation" Hwasung Yeom, Li He, Robert Mariani, Kumar Sridharan, Applied Surface Science Vol. 455 2018 333-342 Link
Presentations:
"Effects of Ti and Al Additions on Irradiation Behavior of FeMnNiCr Based High Entropy Alloys" Andrew Hoffman, Haiming Wen, Li He, Kumar Sridharan, 2019 TMS Annual Meeting March 10-14, (2019)
"Effects of Ti and Al Additions on Irradiation Behavior of FeMnNiCr Based High-Entropy Alloys" Matthew Luebbe, Andrew Hoffman, Hans Pommeranke, Li He, Kumar Sridharan, Haiming Wen, Materials Science & Technology 2019 September 29-3, (2019)
"Heat treatment Effects on Precipitation in Irradiated HT9 Steel" Theresa Mary Green, Li He, Todd Allen, MiNES (Materials in Nuclear Energy Systems) 2019 October 6-10, (2019)
"Ion Irradiation Defects in Austenitic Alloy 709 and Ferritic-Martensitic Steel Grade 92 for Nuclear Applications" Li He, Rigen Mo, Beata Tyburska-Puschel, Kumar Sridharan, Haixuan Xu, Tianyi Chen, Lizhen Tan, MRS Spring 2017 April 17-21, (2017)
"Ion irradiation for nuclear materials research at University of Wisconsin-Madison" Li He, Gabriel Meric, Kim Kriewaldt, Kumar Sridharan, Adrien Couet, Todd Allen, The 51st Symposium of the North Eastern Accelerator Personnel September 23-27, (2018)
"Microstructure Evolution in Dual Ion irradiated HT9 at 445 C and 460 C to 16.6 dpa" Li He, Theresa Mary Green, Todd Allen, MiNES (Materials in Nuclear Energy Systems) 2019 October 6-10, (2019)
"Poster - Examining microstructural differences in irradiated HT9 correlated with differences in processing prior to irradiation" Theresa Mary Green, Li He, Todd Allen, Brandon Miller, Lingfeng He, NUMAT 2018 October 15-18, (2018)
"Study of B2 and Laves Phase E volution in a Novel Ferr itic Steel under Ion Irradiation" Li He, Lizhen Tan, ying yang, Kumar Sridharan, MiNES (Materials in Nuclear Energy Systems) 2019 October 6-10, (2019)
"Study of gamma irradiation effect on the corrosion of zirconium alloy with scanning precession electron diffraction" Li He, Adrien Couet, Samuel Armson, Michael Preuss, Kurt Terrani, Midwest Microscopy and Microanalysis Society Meeting 2019 May 22-22, (2019)
"The Effect of Photon Irradiation on the Corrosion of Zirconium Alloys" Adrien Couet, Yalong He, Kurt Terrani, Samuel Armson, Michael Preuss, Taeho Kim, Mohamed Elbakhshwan, Li He, The 19th International Symposium on Zirconium in the Nuclear Industry May 20-23, (2019)
Additional Publications:
"Novel effects of grain size and ion implantation on grain boundary segregation in ion irradiated austenitic steel" Yongfeng Zhang, Maalavan Arivu, Li He, Kumar Sridharan, Yaqiao Wu, Rinat K. Islamgaliev, Ruslan Z. Valiev, Haiming Wen, Andrew K. Hoffman, [2023] Acta Materialia · DOI: 10.1016/j.actamat.2023.118714 · ISSN: 1359-6454
"Effect of grain size on the irradiation response of grade 91 steel subjected to Fe ion irradiation at 300 °C" Haiming Wen, Li He, Kumar Sridharan, Andrew Hoffman, Maalavan Arivu, Xiaoqing He, Rinat Islamgaliev, Ruslan Valiev, Jiaqi Duan, [2022] Journal of Materials Science · DOI: 10.1007/s10853-022-07480-6 · ISSN: 0022-2461
"Photon Irradiation Effects on Oxide Surface Electrochemistry and Oxide Microstructure of Zircaloy 4 in High-Temperature Water" Yalong He, Kurt Terrani, Samuel A. J. Armson, Philipp Frankel, Michael Preuss, Taeho Kim, Mohamed Elbakhshwan, Li He, Adrien Couet, [2021] Zirconium in the Nuclear Industry: 19th International Symposium · DOI: 10.1520/stp162220190041

Although there exists a correlation between autoclave and in-reactor zirconium alloy performances, consistent oxidation kinetics discrepancies in these two environments have been observed and a fundamental understanding of the oxidation kinetics enhancement under irradiation is still lacking. Recent results obtained at the Advanced Test Reactor by the Naval Nuclear Laboratory show that photon irradiation significantly affects zirconium corrosion kinetics. In reactors, various photon sources are present in the core from ultraviolet (UV) to gamma (γ) rays. This study aims at characterizing the effect of UV and γ rays on the corrosion mechanism of Zircaloy-4. To this end, a state-of-the-art autoclave equipped with sapphire windows and connected to a recirculation loop has been installed. Zircaloy-4 coupons were exposed for 7 days at 260°C with and without recirculation or UV irradiation (or both). Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) oxide characterizations show the presence of iron (Fe)-rich oxide deposits on top of the zirconium oxide where the sample has been irradiated by UV. The deposit concentration is larger in the static corrosion case and does not significantly influence the zirconium oxidation kinetics. A mechanism is proposed to explain the nucleation of these deposits and the relationship to Chalk River Unidentified Deposit nucleation is discussed. In another experiment, Zircaloy-4 coupons have been irradiated at the MIT reactor in neutron+gamma, gamma, and unirradiated loop conditions. The in-core specimens were exposed to ~1021 n/m2 fast neutron fluence in 290°C water at 7 MPa. Oxide layers have been characterized by SEM and TEM. The oxide grain size, t-ZrO2 fraction, fiber texture, and m-ZrO2 twin boundaries’ density were characterized. The results indicate that, at low dpa, the neutron + γ irradiated sample has a more protective oxide than the γ-irradiated sample, which has a more protective oxide than the nonirradiated sample.

"Microstructure, strength and irradiation response of an ultra-fine grained FeNiCoCr multi-principal element alloy" Li He, Zhiqiang Fu, Andrew Hoffman, Kumar Sridharan, Haiming Wen, Jiaqi Duan, [2021] Journal of Alloys and Compounds · DOI: 10.1016/j.jallcom.2020.156796 · ISSN: 0925-8388
"Enhanced Resistance to Irradiation Induced Ferritic Transformation in Nanostructured Austenitic Steels" Maalavan Arivu, Haiming Wen, Li He, Kumar Sridharan, Xin Wang, Wei Xiong, Xiang Liu, Lingfeng He, Yaqiao Wu, Andrew Hoffman, [2020] Materialia · DOI: 10.1016/j.mtla.2020.100806 · ISSN: 2589-1529
"Effects of Al and Ti Additions on Irradiation Behavior of FeMnNiCr Multi-Principal-Element Alloy" Li He, Matthew Luebbe, Hans Pommerenke, Jiaqi Duan, Peipei Cao, Kumar Sridharan, Zhaoping Lu, Haiming Wen, Andrew Hoffman, [2020] JOM · DOI: 10.1007/s11837-019-03871-4 · ISSN: 1047-4838
"UV induced oxide deposition on zirconium alloys in high temperature water" Yalong He, Taeho Kim, Li He, Zefeng Yu, Adrien Couet, Mohamed Elbakhshwan, [2019] Materials Letters · DOI: 10.1016/j.matlet.2019.126726 · ISSN: 0167-577X
"Evolution of B2 and laves phases in a ferritic steel under Fe2+ ion irradiation at 475 °C" Lizhen Tan, Ying Yang, Kumar Sridharan, Li He, [2019] Journal of Nuclear Materials · DOI: 10.1016/j.jnucmat.2019.07.024 · ISSN: 0022-3115
"Enhanced diffusion of Cr in 20Cr-25Ni type alloys under proton irradiation at 670 °C" Ying Yang, Li He, Beata Tyburska-Püschel, Kumar Sridharan, Haixuan Xu, Lizhen Tan, Tianyi Chen, [2018] Nuclear Materials and Energy · DOI: 10.1016/j.nme.2018.10.001 · ISSN: 2352-1791
"Structural evolution of oxidized surface of zirconium-silicide under ion irradiationm" Li He, Robert Mariani, Kumar Sridharan, Hwasung Yeom, [2018] Applied Surface Science · DOI: 10.1016/j.apsusc.2018.06.008 · ISSN: 0169-4332
"Applications and limitations of electron correlation microscopy to study relaxation dynamics in supercooled liquids" Li He, Matthew F. Besser, Ze Liu, Jan Schroers, Matthew J. Kramer, Paul M. Voyles, Pei Zhang, [2017] Ultramicroscopy · DOI: 10.1016/j.ultramic.2016.09.001 · ISSN: 0304-3991
"Measurement of Irradiation-induced Swelling in Stainless Steels with a New Transmission Electron Microscopy Method" Haixuan Xu, Lizhen Tan, Paul Voyles, Kumar Sridharan, Li He, [2017] Microscopy and Microanalysis · DOI: 10.1017/s1431927617011837 · ISSN: 1431-9276
"Evolution of small defect clusters in ion-irradiated 3C-SiC: Combined cluster dynamics modeling and experimental study" L. He, Y. Zhai, B. Tyburska-Püschel, P.M. Voyles, K. Sridharan, D. Morgan, I. Szlufarska, C. Liu, [2017] Acta Materialia · DOI: 10.1016/j.actamat.2016.12.020 · ISSN: 1359-6454
"Size distribution of black spot defects and their contribution to swelling in irradiated SiC" Y. Zhai, L. He, C. Liu, A. Boulle, P.M. Voyles, I. Szlufarska, K. Sridharan, B. Tyburska-Püschel, [2016] Journal of Nuclear Materials · DOI: 10.1016/j.jnucmat.2016.04.044 · ISSN: 0022-3115
"Radiation-induced mobility of small defect clusters in covalent materials" Li He, Dane Morgan, Paul M. Voyles, Izabela Szlufarska, Hao Jiang, [2016] Physical Review B · DOI: 10.1103/physrevb.94.024107 · ISSN: 2469-9950
"Fluctuation Electron Microscopy and Computational Structure Refinement for the Structure of Amorphous Materials" Pei Zhang, Li He, Ankit Gujral, Mark D. Ediger, Paul M. Voyles, Jason Maldonis, [2016] Microscopy and Microanalysis · DOI: 10.1017/s1431927616003287 · ISSN: 1431-9276
"Atomic Resolution Imaging of Black Spot Defects in Ion Irradiated Silicon Carbide" Hao Jiang, Yizhang Zhai, Cheng Liu, Izabela Szlufarska, Beata Tyburska-Puschel, Kumar Sridharan, Paul Voyles, Li He, [2015] Microscopy and Microanalysis · DOI: 10.1017/s1431927615007473 · ISSN: 1431-9276
"Electron Correlation Microscopy: A New Technique for Studying Local Atom Dynamics Applied to a Supercooled Liquid" Pei Zhang, Matthew F. Besser, Matthew Joseph Kramer, Paul M. Voyles, Li He, [2015] Microscopy and Microanalysis · DOI: 10.1017/s1431927615000641 · ISSN: 1431-9276
Abstract

Electron correlation microscopy (ECM) is a new technique that utilizes time-resolved coherent electron nanodiffraction to study dynamic atomic rearrangements in materials. It is the electron scattering equivalent of photon correlation spectroscopy with the added advantage of nanometer-scale spatial resolution. We have applied ECM to a Pd40Ni40P20 metallic glass, heated inside a scanning transmission electron microscope into a supercooled liquid to measure the structural relaxation time τ between the glass transition temperature Tg and the crystallization temperature, Tx. τ determined from the mean diffraction intensity autocorrelation function g2(t) decreases with temperature following an Arrhenius relationship between Tg and Tg+25 K, and then increases as temperature approaches Tx. The distribution of τ determined from the g2(t) of single speckles is broad and changes significantly with temperature.

"Fluctuation Electron Microscopy Study of Medium-Range Packing Order in Ultrastable Indomethacin Glass Thin Films" A. Gujral, M. D. Ediger, P. M. Voyles, L. He, [2015] MRS Proceedings · DOI: 10.1557/opl.2015.48 · ISSN: 0272-9172
ABSTRACT

We have used fluctuation electron microscopy (FEM) to measure the medium range order in the molecular packing of 40 nm thick indomethacin glass films. Vapor deposition of indomethacin can create glasses with extraordinary kinetic stability and high density. We find peaks in the FEM variance at diffraction vector magnitudes between 0.03 and 0.09 Å-1, corresponding to intermolecular packing distances of 1-3 nm. FEM experiments were performed with a 13 nm diameter electron probe, so these data are sensitive to medium-range order in intermolecular packing. The FEM variance from an indomethacin glass with normal stability cooled from the liquid is significantly smaller than the variance from the ultrastable glass, suggesting that ultrastable glass is more structurally heterogeneous at a 13 nm length scale. A dose of ∼7×105 e-/nm2 with a very low beam current of ∼ 2.5 pA at 200 kV was used to minimize electron beam damage to the sample, and the average electron diffraction from the sample is unchanged at total electron doses fourteen times larger than required for a FEM experiment. These preliminary results on medium-range order in molecular glasses suggest that we may be able to provide insight into the structural differences between the remarkable ultrastable thin films and ordinary glasses.

"High-Resolution Scanning Transmission Electron Microscopy Study of Black Spot Defects in Ion Irradiated Silicon Carbide" Yizhang Zhai, Cheng Liu, Chao Jiang, Izabela Szlufarska, Beata Tyburska-Puschel, Kumar Sridharan, Paul Voyles, Li He, [2014] Microscopy and Microanalysis · DOI: 10.1017/s143192761401085x · ISSN: 1431-9276
"Effects of annealing on the compositional heterogeneity and structure in zirconium-based bulk metallic glass thin films" J.P. Chu, C.-L. Li, C.-M. Lee, Y.-C. Chen, P.K. Liaw, P.M. Voyles, L. He, [2014] Thin Solid Films · DOI: 10.1016/j.tsf.2013.09.042 · ISSN: 0040-6090
"Quantification of electron-phonon scattering for determination of temperature variations at high spatial resolution in the transmission electron microscope." Robert Hull, Li He, [2012] Nanotechnology · DOI: 10.1088/0957-4484/23/20/205705
"Correlation of Nanoscale Structure and Magnetic Properties in Manganese Doped Germanium Dilute Magnetic Semiconductors" Wenjing Yin, Jiani Yu, Jiwei Lu, Stuart Wolf, Robert Hull, Li He, [2011] MRS Proceedings · DOI: 10.1557/opl.2011.86 · ISSN: 0272-9172
ABSTRACT

Spintronic devices generally require the spin of carriers to be utilized in the storage or manipulation of data. One theoretical model for ferromagnetism in dilute magnetic semiconductors (DMS) results from the percolation of ferromagnetic regions around dilute dopants such as Mn atoms in III-V or group IV materials through the interaction of Mn atoms with carriers. Our work employed Mn implantation in Ge with subsequent rapid thermal annealing or TEM in-situ annealing to study the correlation between structure and magnetic properties. The magnetic properties of 300-350 ºC implanted Ge:Mn (which produced crystalline Ge films) varied significantly with implantation dose and annealing condition due to precipitation and transformation of different MnxGe1-x secondary phases. It was found that Mn substitution of Ge and MnxGe1-x secondary phases can both result in ferromagnetic properties. By combining TEM in-situ annealing and ex-situ magnetic characterization, we have demonstrated detailed correlation of magnetic properties with nanoscale structures in Mn implanted Ge DMS materials.

"Modulation of the magnetism in ion implanted MnxGe1−x thin films by rapid thermal anneal" Li He, Melissa Commisso Dolph, Jiwei Lu, Robert Hull, Stuart A. Wolf, Wenjing Yin, [2010] Journal of Applied Physics · DOI: 10.1063/1.3486481 · ISSN: 0021-8979

We introduced 1.1 at. % of Mn ions into Ge thin films in order to explore the ferromagnetism in Mn implanted Ge. Rapid thermal anneal (RTA) was applied after the implantation to recrystallize the Ge and enhance the incorporation of Mn ions into the Ge lattice. A maximum saturation moment of 0.7 μB/Mn at 5 K was reached when the sample was annealed at 300 °C for 1 min, and the moment decreased with higher annealing temperatures. Two transitions temperatures Tc and Tcl were observed corresponding to the global ferromagnetism in Mn:Ge bulk and short range magnetic ordering in Mn-rich clusters. Both critical temperatures increased with RTA temperatures and Tcl even persisted close to room temperature for the 400 °C, 1 min anneal. No secondary phases were observed.

"Magnetism in Ge[sub (1−x)]Mn[sub (x)] Thin Films and Quantum Dots Synthesized by Ion Implantation" Li. He, Melissa Commisso Dolph, Jiwei Lu, Robert Hull, Stuart A. Wolf, Donald G. Crabb, Yelena Prok, Matt Poelker, Simonetta Liuti, Donal B. Day, Xiaochao Zheng, Wenjing Yin, [2009] AIP Conference Proceedings · DOI: 10.1063/1.3215791
"Spintronics and Novel Magnetic Materials for Advanced Spintronics" Kevin G. West, Jiani Yu, Wenjing Yin, David M. Kirkwood, Li He, Robert Hull, Stuart A. Wolf, Daryl M. Treger, Jiwei Lu, [2009] Nanoscale Magnetic Materials and Applications · DOI: 10.1007/978-0-387-85600-1_16
"Focused ion beam fabrication of novel core-shell nanowire structures." Jonas Johansson, Mitsuhiro Murayama, Robert Hull, Li He, [2008] Nanotechnology · DOI: 10.1088/0957-4484/19/44/445610
"Ferromagnetism in Rutile Structure Cr Doped VO2 Thin Films Prepared by Reactive-Bias Target Ion Beam Deposition" Jiwei Lu, Li He, David Kirkwood, Wei Chen, T. Paul Adl, Michael S. Osofsky, Syed B. Qadri, Robert Hull, Stuart A. Wolf, Kevin G. West, [2008] Journal of Superconductivity and Novel Magnetism · DOI: 10.1007/s10948-007-0303-y · ISSN: 1557-1939
"Low energy ion assisted deposition of Ta∕Cu films" X. W. Zhou, L. He, R. Hull, H. N. G. Wadley, J. J. Quan, [2007] Journal of Applied Physics · DOI: 10.1063/1.2430705 · ISSN: 0021-8979

A combination of molecular dynamics simulations and experiments has been used to investigate the use of various low energy ion assisted vapor deposition approaches for controlling the interfacial structures of a model copper∕tantalum multilayer system. Films were grown using argon ion beam assistance with either a fixed or modulated ion energy during metal deposition. The effect of sequential ion assistance (after layer’s deposition) was also investigated. The argon ion energy was varied between 0 and 50eV and the effect on the atomic scale structure of Ta∕Cu film interfaces and the film electrical resistivity were studied. The use of simultaneous argon ion assistance with an ion energy of ∼10eV and an ion∕metal atom flux ratio of ∼6 resulted in atomically sharp interfaces with little intermixing, consistent with simulation predictions. Ion impacts in this range activated surface atom jumping and promoted a step flow film growth mode. Higher energies were also successful at interface flattening, but they caused significant intermixing between the layers and increased film’s resistivity. This could be reduced using modulated ion energy and sequential ion beam assistance. This was again consistent with atomic scale simulations, which indicated that metal layers deposited over an interface before ion assistance was initiated impeded atom exchange across interfaces and therefore intermixing.

"Effect of thin strain-compensated Al0.6Ga0.4P layers on the growth of multiple-stacked InP/In0.5Al0.3Ga0.2P quantum dots" J. H. Ryou, R. D. Dupuis, L. He, R. Hull, G. Walter, N. Holonyak, X. B. Zhang, [2006] Journal of Electronic Materials · DOI: 10.1007/s11664-006-0124-y · ISSN: 0361-5235
Source: ORCID/CrossRef using DOI